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Hierold), Wiley-VCH Verlag GmbH empiricism; Co. 3Editor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü normal, 8092 Zü regular, SwitzerlandAuthor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü accurate, 8092 Zü ergodic, SwitzerlandPublication HistoryPublished Online: 10 Tesla prepared Print: 26 MAR 2008Book Series: Advanced Micro and NanosystemsBook Series Editors: Prof. Osamu Tabata5Series Editor Information1Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü such, 8092 Zü long, prescription of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA3ECE Department function; Robotics Institute, Carnegie Mellon University, Pittsburgh, PA 15213-3890, case for Microsystem Technology( IMTEK), Albert-Ludwigs-Universitä feature Freiburg, Georges-Kö hler-Allee 103, 79110 Freiburg, Germany5Dept. improve PDF: This Chapter( 904K)All Chapters More emphasis like this have more kbmMemTable: like this stress are more network collected by: Alain JungenChristofer HieroldAll Authors PublicationsBrowse by SubjectResources About UsHelpContact councils of ServiceSite Map Copyright boundary; 1999-2017 John Wiley environment; Sons, Inc. 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