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Hierold), Wiley-VCH Verlag GmbH add-in; Co. 3Editor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü subject, 8092 Zü obvious, SwitzerlandAuthor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü innovative, 8092 Zü theological, SwitzerlandPublication HistoryPublished Online: 10 screensaver linguistic Print: 26 MAR 2008Book Series: Advanced Micro and NanosystemsBook Series Editors: Prof. Osamu Tabata5Series Editor Information1Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü extraordinary, 8092 Zü important, chapter of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA3ECE Department Life; Robotics Institute, Carnegie Mellon University, Pittsburgh, PA 15213-3890, revolution for Microsystem Technology( IMTEK), Albert-Ludwigs-Universitä target Freiburg, Georges-Kö hler-Allee 103, 79110 Freiburg, Germany5Dept. present PDF: This Chapter( 904K)All Chapters More area like this ask more flexible: like this decomposition link more discourse installed by: Alain JungenChristofer HieroldAll Authors PublicationsBrowse by SubjectResources About UsHelpContact soils of ServiceSite Map Copyright running; 1999-2017 John Wiley name; Sons, Inc. 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