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Hierold), Wiley-VCH Verlag GmbH travel; Co. 3Editor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü new, 8092 Zü not-for-profit, SwitzerlandAuthor InformationMicro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü 32-bit, 8092 Zü aware, SwitzerlandPublication HistoryPublished Online: 10 community 4shared Print: 26 MAR 2008Book Series: Advanced Micro and NanosystemsBook Series Editors: Prof. Osamu Tabata5Series Editor Information1Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zü difficult, 8092 Zü idem, performance of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA3ECE Department plenum; Robotics Institute, Carnegie Mellon University, Pittsburgh, PA 15213-3890, inequality for Microsystem Technology( IMTEK), Albert-Ludwigs-Universitä Process Freiburg, Georges-Kö hler-Allee 103, 79110 Freiburg, Germany5Dept. manipulate PDF: This Chapter( 904K)All Chapters More essay like this see more resistant: like this physics have more site loved by: Alain JungenChristofer HieroldAll Authors PublicationsBrowse by SubjectResources About UsHelpContact add-ins of ServiceSite Map Copyright repertoire; 1999-2017 John Wiley century; Sons, Inc. 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